发明名称 Ferroelectric memory device and method of manufacturing the same
摘要 A ferroelectric memory device includes first electrodes, second electrodes arranged in a direction which intersects the first electrodes, and ferroelectric films disposed in at least intersecting regions of the first electrodes and the second electrodes. Capacitors formed of the first electrodes, the ferroelectric films, and the second electrodes are disposed in a matrix. A ferroelectric phase and a paraelectric phase are mixed in each of the ferroelectric films.
申请公布号 US2003227803(A1) 申请公布日期 2003.12.11
申请号 US20030426635 申请日期 2003.05.01
申请人 SEIKO EPSON CORPORATION 发明人 NATORI EIJI;KIJIMA TAKESHI
分类号 H01L21/02;H01L21/8246;H01L27/115;(IPC1-7):G11C29/00 主分类号 H01L21/02
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