Micro-electromechanical component manufacturing method e.g. for acceleration sensor for vehicle airbag, forming electrically-conductive channel between opposing sides of substrate with micro-electromechanical component on one side

摘要

The manufacturing method has a substrate (6) with 2 opposing sides (2,4) provided with a micro-electromechanical element (3) on one side by formation of at least one electrically-conductive channel (8) between the opposite sides of the substrate. An Independent claim for a micro-electromechanical component is also included.