| 摘要 |
PURPOSE: A method for fabricating a gas sensor is provided to improve selectivity and sensitivity of a gas sensor with respect to methane gas by coating an alumina protective layer on a SnO2 layer. CONSTITUTION: 1-10 wt.% of Pd or PdCl2 is mixed with SnO2 powder. Then, after adding water into the mixture, the mixture is dried. The dried powder is collected and dried again so as to remove wet from the dried powder. In order to fabricate a sensor device, a Pt pattern is formed at a rear surface of an alumina substrate(10) through a screen printing method. Then, a heat-treatment process is carried out so as to fabricate a heater(20). An Au electrode(30) is printed on a front surface of the alumina substrate(10) and a Pd/SnO2 layer(40) is printed on the Au electrode(30), thereby fabricating the sensor device. An alumina surface protective layer(50) is formed by using Sol-Gel method.
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