Method of making diffraction grating device, diffraction grating device, and apparatus for making diffraction grating device

摘要

In a method of making a diffraction grating device, an optical waveguide is irradiated, by way of a phase grating mask, with refractive index modulation inducing light so as to form a diffraction grating in the predetermined region. This method comprises (1) a step of measuring a diffraction efficiency distribution of the phase grating mask; and (2) a step of longitudinally scanning the optical waveguide with the refractive index modulation inducing light by way of the phase grating mask and irradiating the optical waveguide with the refractive index modulation inducing light so as to modulate a refractive index of the predetermined region. Upon scanning with the refractive index modulation inducing light, longitudinal relative positions of the phase grating mask and optical waveguide are changed according to the diffraction efficiency distribution of the phase grating mask.