发明名称 Fully-depleted (FD) (SOI) MOSFET access transistor and method of fabrication
摘要 A fully-depleted (FD) Silicon-on-Insulator (SOI) MOSFET access transistor comprising a gate electrode of a conductivity type which is opposite the conductivity type of the source/drain regions and a method of fabrication are disclosed.
申请公布号 US2003227056(A1) 申请公布日期 2003.12.11
申请号 US20020161615 申请日期 2002.06.05
申请人 WANG HONGMEI;ZAHURAK JOHN K. 发明人 WANG HONGMEI;ZAHURAK JOHN K.
分类号 H01L21/8242;H01L21/84;H01L27/108;H01L27/12;H01L29/49;H01L29/786;(IPC1-7):H01L27/01;H01L31/039 主分类号 H01L21/8242
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