| 摘要 |
<p>The invention relates to a method for calibrating a sensor element for a limiting current probe, in particular for a planar broadband lambda probe, which comprises a pump cell with two pump electrodes (18,19), an inner pump electrode (18) being screened by a porous diffusion barrier (21). To adjust the diffusion resistance of the diffusion barrier (21) to a default value in a highly accurate manner, the thickness of the diffusion barrier (21) is calculated during the production of the sensor element in such a way that said diffusion barrier (21) has a lower diffusion resistance value than the default value, whilst maintaining the production tolerances. In the finished sensor element, a material charge is introduced into the diffusion barrier (21) by sublimation by means of a precursor gas, thus increasing the diffusion resistance to obtain the default value.</p> |
