TEMPERATURE CONTROL APPARATUS OF SEMICONDUCTOR MANUFACTURING BAKE

摘要

PURPOSE: A temperature control apparatus of a semiconductor manufacturing bake is provided to be capable of previously recognizing a disturbance generation signal for preventing the influence due to the generation of disturbance. CONSTITUTION: A temperature control apparatus of a semiconductor manufacturing bake is provided with a disturbance signal generator(30) for generating a disturbance signal when recognizing the generation of disturbance, a subtractor(32) for outputting an error value of 'f(t)' according to a feed-back output value and a temperature compensating input value, and a PID(Proportional Integral Derivative) controller(34) for controlling the temperature of a bake(36). At this time, the bake is used for hardening a wafer at a predetermined temperature by using the temperature control signal of the PID controller. The temperature control apparatus further includes a feedback circuit(38).