摘要 |
A piezoelectric/electrostrictive device 100 includes a pair of mutually confronting thin plate portions 12a and 12b, a fixing portion 14 for supporting the pair of thin plate portions 12a and 12b, movable portions 20a and 20b being provided at tip end portions of the pair of thin plate portions 12a and 12b and having mutually confronting end surfaces 34a and 34b, and piezoelectric/electrostrictive elements 18a and 18b being disposed on respective thin plate portions 12a and 12b, wherein at least both side surfaces of thin plate portions 12a and 12b and piezoelectric/electrostrictive elements 18a and 18b are covered with coating films 101 made of a material with a low thermal expansion coefficient. The piezoelectric/electrostrictive device is excellent in temperature characteristic and ensures displacement following an applied electric field irrespective of change in temperature of environment of use or an element itself, or even upon use at high temperatures.
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