| 摘要 |
<p>A wavefront tilt measurement system includes a light source (110) that emits light from a primary aperture (102). A plurality of tilt sensors (114) are adjacent to the primary aperture (102) and each tilt sensor includes a sensor focal plane (106) and a plurality of detector elements. Each tilt sensor generates at the focal plane a plurality of overlapping regions of zero and first order images of light emerging from the primary aperture. The measured intensity of light in the overlapping regions is used to determine the wavefront tilt of light emerging from the primary aperture (102).</p> |
