METHOD FOR MANUFACTURING FERROELECTRIC CAPACITOR

摘要

PURPOSE: A method for manufacturing a ferroelectric capacitor is provided to be capable of improving the coating property of a ferroelectric film in MTP(Merged Top Electrode) structure formation. CONSTITUTION: A plurality of lower electrodes(21) are formed on a substrate(20). A capacitor insulating layer(22) is formed on the entire surface of the resultant structure. The capacitor insulating layer(22) is planarized by wet-etching to expose the surface of the lower electrodes(21). A ferroelectric film(23) and an upper electrode(24) are sequentially formed on the lower electrode and the capacitor insulating layer.