| 摘要 |
PURPOSE: An air floating device is provided to precisely control the flatness and horizontality of parts by using an air bearing and a vacuum effect. CONSTITUTION: An air floating device is composed of an upper hemispheric air floater(20), a lower air floater(10) having a hemispheric surface corresponding to the lower surface of the upper air floater and adhering closely to the upper air floater, a base(50) located below the lower air floater and enclosing the lower air floater, a ring-shaped flexible pad(30) connecting the outer circumference of the upper air floater to the outer circumference of the lower air floater in sealing state, and a jig(22) mounted at the upper center of the upper air floater and fixing parts. A plurality of air vents(12) are formed at the lower air floater, and are connected to a vacuum pump. The upper air floater floats on the lower air floater by an air film when the vacuum pump supplies air, and is fixed to the lower air floater when the vacuum pump sucks air.
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