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发明名称
CIRCUIT FOR FOCUSED ION BEAM SENSOR
摘要
申请公布号
EP1368834(A2)
申请公布日期
2003.12.10
申请号
EP20020714017
申请日期
2002.02.15
申请人
INFINEON TECHNOLOGIES AG
发明人
TADDIKEN, HANS
分类号
G06K19/073;G06F21/06;G06K19/07;G11C16/22;(IPC1-7):H01L23/58
主分类号
G06K19/073
代理机构
代理人
主权项
地址
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