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发明名称
摘要
申请公布号	JP3476482(B2)	申请公布日期	2003.12.10
申请号	JP19920130966	申请日期	1992.05.22
申请人		发明人
分类号	H01J37/22;G01Q30/02;G01Q30/04;H01J37/244;H01J37/26;H01J37/28;(IPC1-7):H01J37/22	主分类号	H01J37/22
代理机构		代理人
主权项
地址

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