发明名称 |
Magnetic field generator for magnetron plasma |
摘要 |
<p>A magnetic field generator for confining plasma within a vacuum chamber is disclosed. The magnetic field generator produces a multi-pole magnetic field around a workpiece positioned within the vacuum chamber. The magnetic field generator is provided outside the vacuum chamber and comprises a plurality of segment type permanent magnets circularly arranged The magnetic field generator further comprises a plurality of magnetic members to which the segment type permanent magnets are selectively attached. <IMAGE></p> |
申请公布号 |
EP1369898(A2) |
申请公布日期 |
2003.12.10 |
申请号 |
EP20030012176 |
申请日期 |
2003.06.03 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
MIYATA, KOJI |
分类号 |
H05H1/10;B01J19/08;C23C14/35;H01F7/02;H01J37/32;H01L21/3065;H05H1/11;H05H1/46;(IPC1-7):H01J37/32 |
主分类号 |
H05H1/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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