| 摘要 |
<p>A container has a storage case (1) for storing silicon wafers in alignment which is of a box-like configuration having an opening on its front side, with a multiple-number of fitting slots (5) formed on the inner top and bottom faces near the front opening. The container further has a FIMS door (6) for opening and closing off the front opening of the storage case (1), a gasket (7) attached to the rim of the FIMS door (6), a latching mechanism (8) provided in the FIMS door (6) for causing engaging claws (12) to fit into corresponding fitting slots (5) when the FIMS door (6) is attached and releasing the engagement of the engaging claws (12) with the fitting slots (5) when the FIMS door (6) is removed, and an outer door (13) for shipping, fitted on the front side where the storage case has been confined with the FIMS door (6), for covering the FIMS door (6). <IMAGE></p> |
