| 发明名称 |
METHOD FOR THE PRODUCTION OF A FUNCTIONAL COATING BY MEANS OF A HIGH-FREQUENCY ICP PLASMA BEAM SOURCE |
| 摘要 |
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| 申请公布号 |
EP1368506(A1) |
申请公布日期 |
2003.12.10 |
| 申请号 |
EP20010273584 |
申请日期 |
2001.11.21 |
| 申请人 |
ROBERT BOSCH GMBH |
发明人 |
GROSSE, STEFAN;HENKE, SASCHA;SPINDLER, SUSANNE |
| 分类号 |
H05H1/42;B01J19/08;C23C16/505;C23C16/513;C23C16/515;C23C16/52;H05H1/46;(IPC1-7):C23C16/513;B05B7/22;H05H1/24;H05H1/54 |
主分类号 |
H05H1/42 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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