发明名称 |
Electronic device and process for producing the same |
摘要 |
Electrically functional electronic device including an organic electroluminescence device is protected with a dense protective film, e.g. a silicon oxynitride film, formed on at least one part of the outer surface of the device at a low temperature by ECR plasma sputtering can prevent permeation of moisture, oxygen etc. into the device from the outside.
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申请公布号 |
US6660409(B1) |
申请公布日期 |
2003.12.09 |
申请号 |
US20000660335 |
申请日期 |
2000.09.12 |
申请人 |
PANASONIC COMMUNICATIONS CO., LTD;NAKASHIMA HIROSHI |
发明人 |
KOMATSU TAKAHIRO;GYOUTOKU AKIRA;HARA SHINTARO;HAMANO TAKAFUMI;NAKASHIMA HIROSHI;GAO DAWEI;MURAOKA KATSUNORI;FURUKAWA KATSUHIKO |
分类号 |
H01L51/52;(IPC1-7):H05B33/04 |
主分类号 |
H01L51/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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