| 发明名称 |
Diamond-like carbon film with enhanced adhesion |
| 摘要 |
A method and apparatus for enhancing the adhesion of a diamond-like carbon (DLC) film to a substrate and for producing a strongly adhered DLC film on a substrate. The adhesion is enhanced by ion beam pre-processing of the substrate prior to DLC film formation.
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| 申请公布号 |
US6660340(B1) |
申请公布日期 |
2003.12.09 |
| 申请号 |
US20000717182 |
申请日期 |
2000.11.21 |
| 申请人 |
EPION CORPORATION |
发明人 |
KIRKPATRICK SEAN R. |
| 分类号 |
C23C14/02;C23C14/06;C23C14/48;C23C16/02;C23C16/26;(IPC1-7):C23C14/48;C23C14/24 |
主分类号 |
C23C14/02 |
| 代理机构 |
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代理人 |
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