发明名称 |
Dual damascene metal interconnect structure with dielectric studs |
摘要 |
A method for forming a dual damascene conductive line and conductive plug using porous low k dielectric materials in the via and trench layers. The via layer is provided with dense low k dielectric plugs that increase the mechanical strength of the porous low k dielectric layer that forms the via layer. A via fill technique etches some of the dielectric plugs in the via layer and fills them with conductive material. The via fill technique reduces the damage done to the via holes in the via layer caused by photoresist removal processes.
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申请公布号 |
US6660619(B1) |
申请公布日期 |
2003.12.09 |
申请号 |
US20020058048 |
申请日期 |
2002.01.29 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
PANGRLE SUZETTE K.;OKADA LYNNE A.;WANG FEI |
分类号 |
H01L21/768;(IPC1-7):H01L21/320;H01L21/476 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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地址 |
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