发明名称 |
Scanning probe instrument |
摘要 |
A scanning probe instrument which can calibrate measured values and permits accurate length measurements regardless of a magnification factor. A scan signal generator produces a fine movement signal that is amplified or attenuated by an attenuator. Magnification data items for various magnification modes are stored in a dimensional relation storing portion. A magnification selector portion reads data for setting either magnification corresponding to the present mode of operation of the scanning probe instrument specified by a mode signal from the dimensional relation storing portion and sends it to an attenuator. The attenuator amplifies or attenuates the scan signal at a magnification corresponding to the magnification data supplied via the magnification selector portion. |
申请公布号 |
US6661006(B2) |
申请公布日期 |
2003.12.09 |
申请号 |
US20010888776 |
申请日期 |
2001.06.25 |
申请人 |
SEIKO INSTRUMENTS INC. |
发明人 |
SATO YUKIHIRO;MATSUZAKI RYUICHI |
分类号 |
G01Q10/00;G01Q10/04;G01Q30/06;(IPC1-7):G12B21/20;G12B21/22;G01N37/00;H01J37/00 |
主分类号 |
G01Q10/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|