WAFER LOADING/UNLOADING SYSTEM OF EQUIPMENT FOR FABRICATING SEMICONDUCTOR DEVICE

摘要

PURPOSE: A wafer loading/unloading system of equipment for fabricating a semiconductor device is provided to preserve a normal state of a wafer and prevent a plurality of wafers from being broken by controlling driving of a robot for drawing the wafer that is broken or abnormally placed in a cassette unit like a boat. CONSTITUTION: A state detection unit(22a,22b) detects the state of the wafer mounted on the cassette unit(20). A robot(14) mounts or draws the wafer from the cassette unit according to an applied control signal. A control unit receives and determines a detection signal from the state detection unit and controls the driving of the robot.