| 摘要 |
PURPOSE: A resonator is provided to increase the Q value by using an air cavity. CONSTITUTION: An upper dielectric plate(221) includes a first groove(221a) having a conductive thin film surface. A lower dielectric plate(222) includes a second groove(222a) having a conductive thin film surface. The first groove(221a) and the second groove(222a) is coupled to form an air cavity. Upper and lower conductive plates(210,230) are formed on an upper portion of the upper dielectric plate(221) and on a lower portion of the lower dielectric plate(222). A pad drawn from an end of the air cavity is connected to the upper conductive plate(210) formed on the lower dielectric plate(222). The upper and lower conductive plates(210,230) coated with a conductive material are in the form of thin films.
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