SEMICONDUCTOR DEVICE TEST APPARATUS WHERE MOUNTING AND ATE ARE INTEGRATED

摘要

PURPOSE: A semiconductor device test apparatus is provided to improve test performance and to reduce test time. CONSTITUTION: A mounting test apparatus tests a semiconductor device under a mounted environment constituted with a CPU and a chipset. A pattern generation board(380) has an own processor designed in an ELPD(412) to enable a pattern programming of the semiconductor device. An automatic test equipment(ATE) performs the test using a test pattern by generating the test pattern using the pattern generation board. And a power generator supplies power source to the mounting test apparatus and the ATE.