CANTILEVER SENSOR AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: A cantilever sensor and a method for manufacturing the same are provided to reduce a size of a cantilever sensor system by allowing the cantilever sensor to detect an electric signal instead of an optical signal. CONSTITUTION: A part of a first silicon nitride layer(21) is formed on a silicon substrate(20) and the remaining part of the first silicon nitride layer is formed on a membrane. A silicon oxide layer(23) is formed on the first silicon nitride layer. A lower electrode(24) having a predetermined size is formed on the silicon oxide layer. A first piezo-electric layer(25) is formed on the lower electrode and a second piezo-electric layer is formed in such a manner that the second piezo-electric layer is separated from the first piezo-electric layer. An upper electrode layer(26) is formed on the first and second piezo-electric layers. A protective layer having first and second openings(31,32) is formed on the upper electrode. First and second contact pads(28,29) are formed in the first and second openings.