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发明名称
DEVICE FOR RECEIVING PLATE-SHAPED OBJECTS
摘要
申请公布号
KR20030093358(A)
申请公布日期
2003.12.06
申请号
KR20037014971
申请日期
2003.11.17
申请人
发明人
分类号
H01L21/324;H01L21/00;H01L21/68;H01L21/687
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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