HANDLER FOR GLASS SUBSTRATE

摘要

PURPOSE: A handler for a glass substrate is provided to simply and efficiently inspect a large and thin glass substrate by inspecting the glass substrate while stably and accurately holding for multi-degree of freedom motion. CONSTITUTION: A rotary column(10) is installed on a base for a Z-axis rotary motion. A motion girder(20) is installed for a Z-axis translation and an X-axis translation to the rotary column. An up-down air cylinder(30) lifts the motion girder following the rotary column. A holding unit(40) is installed adjacent to the motion girder for holding a glass substrate. A rotary actuator(100) rotates the holding unit on an X-axis to the motion girder.