GAS SUPPLY CONTROL APPARATUS IN SEMICONDUCTOR FABRICATING PROCESS

摘要

PURPOSE: A gas supply control apparatus in a semiconductor fabricating process is provided to prevent a process defect caused by a malfunction of an electromagnetic valve by checking whether the valve breaks down or operates abnormally. CONSTITUTION: A pneumatic valve(110) is installed in a gas supply line. The electromagnetic valve(120) controls the pneumatic valve. A pneumatic line(130) connects the electromagnetic valve with the pneumatic valve. An interlock apparatus(140) checks the pressure of the pneumatic line to determine whether the electromagnetic valve malfunctions. A pressure sensor(142) detects the pressure of the pneumatic line. A controller(144) receives the data from the pressure sensor and compares the data with a control signal regarding the operation of the electromagnetic valve to determine whether an interlock occurs. The interlock apparatus includes the pressure sensor and the controller.