发明名称 WAFER SENSOR FOR INDEXER
摘要 PURPOSE: A wafer sensor for an indexer is provided to more easily replace a sensor by fixing a socket to the indexer and assembling the main body of the sensor into the socket, and to minimize the interval of time for the replacement by separating/assembling only the main body of the socket from/into the socket. CONSTITUTION: One end of an electric wire(30) is fixed to a printed circuit board by soldering. The other end of the electric wire is connected to the inside of the socket(21) that is firmly fixed to the indexer(10). The main body(22) of the sensor is detachably assembled into the socket to interconnect terminals.
申请公布号 KR20030092728(A) 申请公布日期 2003.12.06
申请号 KR20020030504 申请日期 2002.05.31
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, SEUL GI
分类号 H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/68
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