| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an excimer light irradiation device having a window member easy to clean when exchanging of which, using amount of raw material at every window member is reduced and strength is secured while making the best of the merit of a conventional cylinder-shaped window material. <P>SOLUTION: The excimer light irradiation device is formed by arranging the window member shaped into a cylinder vertically cut almost in half, through which the light emitted from a lengthwise excimer lamp penetrates, in the direction of the tube axis of the excimer lamp so as to keep a distance from the excimer lamp. The window member shaped into a cylinder vertically cut almost in half is fixed to a cooling block located near the excimer lamp, or fixed to a casing or to a window frame communicating with the cooling block. <P>COPYRIGHT: (C)2004,JPO |
