PIEZOELECTRIC ELEMENT, INK JET HEAD AND MANUFACTURING METHOD OF THE SAME, AND INK JET RECORDING DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce variations in characteristic of a piezoelectric element and to improve breakdown voltage and reliability by forming a piezoelectric layer consisting of a perovskite type oxide having excellent crystallinity and degree of (001) face crystal orientation in the piezoelectric element.

SOLUTION: A first electrode layer 14 made of a noble metal containing a titanium or titanic oxide is formed on a substrate 11. An orientation- controlling layer 15 made of a perovskite type oxide (strontium titanate, etc.), containing a strontium of a cubic or tetragonal system is formed on the layer 14. The layer 15 is preferentially oriented to a (100) face or (001) face, and a piezoelectric layer 16 made of a perovskite type oxide (PTZ, etc.), of a rhombohedral or tetragonal system is formed on the layer 15. The layer 16 is preferentially oriented to the (001) face.

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