摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric resonance piece, capable of reducing a piezoelectric device in size and thickness, and ensuring strength in a groove portion, and to provide a piezoelectric device. SOLUTION: In a tuning fork piezoelectric resonance piece 20, two resonance arms 26 are provided, so as to extend from a base portion 22, a groove portion 28 is formed on each of the arms 26, and an excitation electrode is formed in the groove portion 28; and in addition to these, the surface of the base portion 22 is protruded in the thickness direction to form a supporting portion 24, a connection electrode is formed on the surface of the supporting portion 24, so that the power can be supplied from the connection electrode to the excitation electrode. For this resonance piece 20, the supporting portion 24a is fixed on a cavity bottom surface 44 of a package 40, and the supporting portion 24b is fixed on a lid 48, thereby forming a piezoelectric resonator 1. COPYRIGHT: (C)2004,JPO
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