| 摘要 |
PROBLEM TO BE SOLVED: To obtain a design rule generation system which can generate precise design rules while taking into consideration even a phenomenon which is not evaluated with measured values. SOLUTION: Based upon layout information D1 and process information D2, three-dimensional TCAD 3 simulates a three-dimensional structure while taking an adversely influencing device phenomenon into consideration to output electric characteristic data D3 corresponding to design rules prescribed in layout information D1 as many times as the plurality of design rules. A simulation result accumulation part 4 accumulates one by one the electric characteristic data D3 obtained by the three-dimensional TCAD 3 to obtain accumulated electric characteristic data D30 as electric characteristic data made to correspond to the plurality of design rules. A design rule determination part 5 determines the optimum design rule satisfying a reference value among the plurality of design rules according to the accumulated electric characteristic data D30 and outputs it as a determined design rule D5. COPYRIGHT: (C)2004,JPO
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