发明名称 SEMICONDUCTOR INTEGRATED-CIRCUIT DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To increase memory capacity of an SRAM without increasing the number of MISFETs. <P>SOLUTION: In a first n-channel-MISFET forming region nMIS1, for example, an impurity that gives p-type conductivity is introduced to form a p<SP>-</SP>-channel region 6, and the impurity that gives p-type conductivity is again introduced to form a p<SP>+</SP>-channel region 8. Then, by forming a gate electrode 11 and n-type semiconductor regions 14, an n-channel MISFET is formed, wherein the MISFET has a channel region where different impurity concentrations coexist underneath the gate electrode 11. As a consequence, the MISFET has two threshold voltages consisting of a relatively high threshold voltage and a relatively low threshold voltage. <P>COPYRIGHT: (C)2004,JPO
申请公布号 JP2003347433(A) 申请公布日期 2003.12.05
申请号 JP20020152778 申请日期 2002.05.27
申请人 RENESAS TECHNOLOGY CORP 发明人 NISHIDA AKIO;NAKAMICHI MASARU
分类号 H01L27/092;H01L21/8238;H01L21/8244;H01L27/10;H01L27/11 主分类号 H01L27/092
代理机构 代理人
主权项
地址