| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coating method and a coating device capable of forming a coated film such as a resist film or the like with high film thickness accuracy and film thickness uniformity. <P>SOLUTION: This device comprises a substrate holding member 71 for almost horizontally holding a treatment substrate W, a motor 72 for rotating the substrate holding member 71, a coating agent injection nozzle for injecting a coating agent on the treatment substrate W held by the substrate holding member 71, a pump 97 for injecting the coating agent from a coating agent injection nozzle 90, a valve 94 provided in a pipe for supplying the coating agent to the coating agent injection nozzle 90, a detection means 100 for detecting the injection start of the coating agent from the coating agent injection nozzle 90, and a control means 110 for inputting a detection signal and controlling, based on the detection signal, at least one of the drive timing of the pump 97, the operation timing of the valve 94 and the drive start or stop timing of the motor 72. <P>COPYRIGHT: (C)2004,JPO |
