| 摘要 |
PROBLEM TO BE SOLVED: To improve deformation efficiency in a piezoelectric element having a multi-layer structure. SOLUTION: A piezoelectric element 26 has a common upper electrode 35 and a common lower electrode 36 which are electrically connected with each other and a driving electrode 30 electrically connected to a source for supplying a driving signal, wherein the driving electrode is formed between an upper layer piezoelectric material and a lower layer piezoelectric material and the common lower electrode is formed in the lower portion of the lower layer piezoelectric material 34 opposite to the driving electrode and the common upper electrode is formed in the upper portion of the upper piezoelectric material 33. The piezoelectric material 34 covers the common lower electrode over the entire width, and upper piezoelectric material 33 covers the electrode 30 over the entire width. For at least one of the piezoelectric bodies 33 and 34, the thicknesses of end regions WL, WR which are positioned outside the electrode 30 are made smaller than that of a center region WC positioned within the width of the electrode 30. COPYRIGHT: (C)2004,JPO
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