| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer detection apparatus in which variations optical axis positions of a transmitter and a receiver are prevented, lowering in the detection accuracy of a wafer is suppressed and mechanical limitations in mounting the transmitter and the receiver are reduced. SOLUTION: The wafer detection apparatus is provided with: a screen 8 which is connected with a lid 3b for opening/closing the lid 3b; a longitudinal moving means 9 for longitudinally moving the screen 8 relative to an opening 3c; a screen supporting means 10 for supporting the screen 8 and the longitudinal moving means 9; a wafer detecting part 6 having the transmitter and the receiver; a wafer detecting part supporting means 7 which is formed separately from the screen supporting means 10 for supporting the wafer detecting means 6; and a connection means 11 for connecting the wafer detecting part supporting means 7 and the screen supporting means 10. As the connection means 11 descends in the direction of the height of a wafer storage vessel 3, the wafer detecting part supporting means 7 and the screen supporting means 10 also descend, and the wafer detecting part 6 detects the presence/non-presence of wafers W in each rack. COPYRIGHT: (C)2004,JPO |
