| 摘要 |
PROBLEM TO BE SOLVED: To provide a glow discharge device for preventing damage by arc discharge by highly accurately controlling power supply. SOLUTION: A power source device 1 for supplying DC power to a pair of electrodes 3A and 3B within a vacuum chamber 5 is provided with a rectifying circuit 12 constituting self arc-extinguishing elements 18U, 18V, 18W, 19U, 19V and 19W like a bridge. The rectifying circuit 12 is connected to a pulse width control circuit 14 for performing pulse width modulation controls of the self arc-extinguishing elements 18U, 18V, 18W, 19U, 19V and 19W corresponding to sine waves of three-phase AC power supply 7. Each displacement in load voltage, voltage drop, load current and current rises of the electrodes 3A and 3B during glow discharge is compared to recognize a transition to arch discharge. At the point of the recognition of the transition to arc discharge, a pulsed conducting state is stopped, a state is immediately made into a non-conducting state and supply of DC power can be stopped. COPYRIGHT: (C)2004,JPO |
