| 摘要 |
PROBLEM TO BE SOLVED: To achieve a manufacturing method of a magnetic recording medium and a manufacturing apparatus of the magnetic record medium, that can efficiently form a multilayer laminated magnetic film in a vertical medium with high medium performance. SOLUTION: By using a pallet conveyance type of film-forming system sputtering film-forming apparatus for mounting a substrate 11 to a pallet 12 for conveying, diverse targets 13, 14 are successively and repeatedly mounted to one cathode 15, thus forming an extremely thin multilayer laminated magnetic film. COPYRIGHT: (C)2004,JPO
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