发明名称 METHOD FOR PRODUCING A COMPONENT COMPRISING A CONDUCTOR STRUCTURE THAT IS SUITABLE FOR USE AT HIGH FREQUENCIES AND CORRESPONDING COMPONENT
摘要 The invention relates to a method for producing a substrate (1) comprising a conductor assembly (4, 41, 42) that is suitable for use at high frequencies, said substrate having improved high-frequency characteristics. The method comprises the following steps: deposition of a structured glass layer (9, 91, 92, 93, 13) comprising at least one opening (8) above a contact region (71 - 74) by vapour deposition on the substrate (1); and application of at least one conductor structure (100, 111, 112, 113) to the glass layer (9, 91 - 93), which is in electric contact with the contact region (71 - 74).
申请公布号 WO03100859(A2) 申请公布日期 2003.12.04
申请号 WO2003EP05415 申请日期 2003.05.23
申请人 SCHOTT GLAS;CARL-ZEISS-STIFTUNG TRADING AS SCHOTT GLAS;CARL-ZEISS-STIFTUNG;LEIB, JUERGEN;MUND, DIETRICH 发明人 LEIB, JUERGEN;MUND, DIETRICH
分类号 H05K3/46;B81C1/00;C03B19/00;C03C4/12;C03C14/00;C03C15/00;C03C17/02;C03C17/34;C23C14/10;H01L21/316;H01L21/50;H01L21/56;H01L21/768;H01L23/10;H01L23/29;H01L23/31;H01L23/48;H01L23/498;H01L23/532;H01L23/66;H01L51/52;H01P11/00;H05K3/28 主分类号 H05K3/46
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