| 发明名称 |
ELECTRONIC DEVICES AND METHODS OF MANUFACTURE |
| 摘要 |
<p>An electronic device (110B) comprises a substrate (110B) with a trench (120B) having a lower (121B) portion and a top portion (122B). The lower portion (121B) of the trench (120B) is filled with a cured spin-on compound (130B), while the top portion (122B) is filled with a chemical vapor-deposited compound (140B). Preferably, the chemical vapor-deposited compound (140B) has a surface (141B) that is substantially coplanar with the surface (111B) of the substrate (110B).</p> |
| 申请公布号 |
WO03021636(B1) |
申请公布日期 |
2003.12.04 |
| 申请号 |
WO2002US26780 |
申请日期 |
2002.08.23 |
| 申请人 |
HONEYWELL INTERNATIONAL INC.;ENDISCH, DENIS;LEVERT, JOSEPH |
发明人 |
ENDISCH, DENIS;LEVERT, JOSEPH |
| 分类号 |
H01L21/76;H01L21/312;H01L21/316;H01L21/762;(IPC1-7):H01L21/76;H01L29/00 |
主分类号 |
H01L21/76 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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