发明名称 |
Piezoelectric filter and electronic component including the same |
摘要 |
A piezoelectric filter includes a piezoelectric thin film disposed on a silicon substrate, and a plurality of piezoelectric resonators each having electrodes facing each other with the piezoelectric thin film sandwiched therebetween, and each of the plurality of piezoelectric resonators has a filtering function. The electrode material of one of the piezoelectric resonators is different from the electrode material of the other piezoelectric resonators. For example, the former electrode material has a higher stiffness than the latter electrode material. The piezoelectric filter achieves high-Q resonance and improves the attenuation characteristic.
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申请公布号 |
US2003222539(A1) |
申请公布日期 |
2003.12.04 |
申请号 |
US20030446963 |
申请日期 |
2003.05.29 |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
TAKEUCHI MASAKI;YAMADA HAJIME;KAWAMURA HIDEKI;NAKAMURA DAISUKE |
分类号 |
H03H9/54;H03H9/17;H03H9/56;H03H9/58;(IPC1-7):H01L41/047 |
主分类号 |
H03H9/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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