| 摘要 |
<p>In order to generate a defect classification device satisfying a classification request from a user, firstly, the defect classification device is expressed by a decision tree for hierarchically classifying defect classes by a plurality of branching elements. Separate classification rules are assigned to the respective branching elements. Configuration of the decision tree and specification of the classification rules are determined according to display of distribution state of attributes of defective samples (including separation degree of each attribute between defective samples belonging to each defect class) indicated by the user for each of the branching elements. Moreover, the classification request from the user is clarified by using GUI which almost simultaneously displays various inspection information obtained from a plurality of defect inspection devices.</p> |
