Shower tubing for PRS wet bench

摘要

Shower tubing which enhances the spray uniformity of deionized water or other rinsing fluid on multiple semiconductor wafers in a wet bench to improve uniformity in the particle-removing capability of the wet bench. Each of a pair of parallel shower tubes in a wet bench cleaning bath is fitted with multiple, closely-adjacent shower nozzles which provide a substantially uniform spray of deionized water or other cleansing or rinsing chemical to all of multiple substrates in the bath.