METHOD OF PROVIDING A SUBSTRATE SURFACE WITH A PATTERNED LAYER

摘要

A method of manufacturing a patterned layer (4) on a substrate comprises providing a substrate surface (2) with a dam structure (6) partitioning the substrate surface into a plurality of compartments for containing fluid from which regions of the patterned layer are obtainable, filling, using a wet deposition method, compartments with volumes of fluid and then obtaining from the volumes of fluid regions of the patterned layer. In order to obtain a patterned layer which has a relatively large thickness and a good uniformity in thickness, the filling and obtaining is done in several passes, each pass comprising filling a selection of compartments with fluid having a volume larger than the volume of the compartment and obtaining the corresponding regions therefrom, taking care that in no selection two compartments which are nearest-neighbor of each other are included.