发明名称 APPARATUS AND METHOD FOR IMPROVING ELECTRICAL CONDUCTION STRUCTURE OF A VERTICAL CAVITY SURFACE EMITTING LASER
摘要 A heavily doped semiconductor layer (280) is formed over the barrel of a vertical cavity surface emitting laser (VCSEL) (200), providing current conduction and current spreading across and into the aperture of a laser barrel, while eliminating the need for a light-obstructing conductive electrical contact overhang. The VCSEL (200) comprises a substrate (220), a first distributed Bragg reflector (DBR) (230), an active region (240), a second DBR (250) having a non-conductive ion implantation region (255) and a laser barrel region with a first diameter (260), the heavily doped semiconductor layer (280), and a conductive electrical contact (215). The conductive electrical contact defines an opening with a second diameter (265) that is greater than the first diameter (260).
申请公布号 WO03085788(A3) 申请公布日期 2003.12.04
申请号 WO2003US09915 申请日期 2003.04.01
申请人 AXT, INC.;ZHANG, XIAOBO 发明人 ZHANG, XIAOBO
分类号 H01S5/042;H01S5/183 主分类号 H01S5/042
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