| 摘要 |
A substrate processing apparatus (10) comprising a frame (16), a drive section (42), an articulated arm (44), and at least one pair of end effectors (64, 66). The drive section (42) is connected to the frame (16). The articulated arm (44) is connected to the drive section (42). The articulated arm (44) has a shoulder (72) and a wrist. The arm (44) is pivotally mounted to the drive section (42) at the shoulder (72). The pair of end effectors (64, 66) is connected to the articulated arm (44). The pair of end effectors (64, 66) is pivotally jointed to the wrist of the articulated arm (44) to rotate relative to the articulated arm (44) about a common axis of rotation at the wrist. Each end effector (64, 66) is independently pivotable about the common axis of rotation of the wrist relative to the articulated arm (44). |
