发明名称 Thin film piezoelectric element and its manufacturing method, and actuator using the same
摘要 An actuator comprises first and second structures each with a piezoelectric layer sandwiched between a main electrode layer and an opposed electrode layer, which structures are formed on two substrates, respectively. A first main electrode layer and a first opposed electrode layer are provided with layer two projections, and a second opposed electrode layer is provided with one layer projection. Connection wiring is arranged for establishing connection, with the above two structures bonded to each other, between the layer projection of the first main electrode layer and the second main electrode layer, and between the layer projection of the first opposed electrode layer and the layer projection of the second opposed electrode layer. Thus, it is possible to provide an actuator which may assure highly accurate position control.
申请公布号 US2003223155(A1) 申请公布日期 2003.12.04
申请号 US20030387378 申请日期 2003.03.14
申请人 UCHIYAMA HIROKAZU 发明人 UCHIYAMA HIROKAZU
分类号 G11B21/02;G11B5/55;G11B5/596;G11B21/10;H01L41/09;H01L41/18;H01L41/22;(IPC1-7):G11B5/56 主分类号 G11B21/02
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