| 摘要 |
The present invention provides improved MEMS devices and methods for use with fiber-optic communications systems. In one embodiment, an apparatus (100) for steering light has a base layer (110), a beam layer (114) and a folded flexure assembly (120) coupled therebetween. The folded flexure assembly complete underlies the beam layer, and facilitates rotation of the beam layer relative to the base layer. The flexure assemblies further provide a counter rotation force to help prevent the beam layer from sticking in an actuated position. In one aspect, the base layer includes raised portions (140, 142) which operate as mechanical stops for the beam layer. In this manner, the counter rotation force helps prevent the beam layer from sticking to the base layer or the raised portions.
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