发明名称 |
CHARGED PARTICLE BEAM COLUMN AND METHOD FOR DIRECTING A CHARGED PARTICLE BEAM |
摘要 |
A method and charged particle beam column are presented for directing a primary charged particle beam onto a sample. The primary charged particle beam, propagating along an initial axis of beam propagation towards a focusing assembly, passes through a beam shaper, that affects the cross section of the primary charged particle beam to compensate for aberrations of focusing caused by astigmatism effect of a focusing field produced by an objective lens arrangement of the focusing asembly, and then passes through a beam axis alignment system, that aligns the axis of the primary charged particle beam with respect to the optical axis of the objective lens arrangement. |
申请公布号 |
WO03100815(A2) |
申请公布日期 |
2003.12.04 |
申请号 |
WO2003US14974 |
申请日期 |
2003.05.12 |
申请人 |
APPLIED MATERIALS, INC.;APPLIED MATERIALS ISRAEL, LTD. |
发明人 |
PETROV, IGOR;ROSENBERG, ZVIKA |
分类号 |
H01J37/04;H01J37/147;H01J37/153;H01J37/244;H01J37/28 |
主分类号 |
H01J37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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