发明名称 |
Target steering system for EUV droplet generators |
摘要 |
An EUV radiation source (50) that employs a steering device (74) for steering a stream (66) of droplets (68) generated by a droplet generator (52) so that the droplet (68) are directed towards a target location (76) to be vaporized by a laser beam (78). The direction of the stream (66) of droplets (68) is sensed by a sensing device (84). The sensing device (84) sends a signal to an actuator (88) that controls the orientation of the steering device (74) so that the droplets (68) are directed to the target location (76).
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申请公布号 |
US2003223541(A1) |
申请公布日期 |
2003.12.04 |
申请号 |
US20020157222 |
申请日期 |
2002.05.28 |
申请人 |
PETACH MICHAEL B.;FORNACA STEVEN W.;ORSINI ROCCO A. |
发明人 |
PETACH MICHAEL B.;FORNACA STEVEN W.;ORSINI ROCCO A. |
分类号 |
G21K5/00;G03F7/20;G21K5/02;H01L21/027;H05G2/00;H05H1/24;(IPC1-7):H05H1/00 |
主分类号 |
G21K5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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